A novel ion source for high current ion implantation.
| Autor: | Renau, A., Smatlak, D. |
|---|---|
| Zdroj: | Proceedings of 11th International Conference on Ion Implantation Technology; 1996, p279-282, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Renau, A., Smatlak, D. |
|---|---|
| Zdroj: | Proceedings of 11th International Conference on Ion Implantation Technology; 1996, p279-282, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|