Miniature one-shot valve.

Autor: Guerin, L.J., Dubochet, O., Zeberli, J.-F., Clot, P., Renaud, P.
Zdroj: Proceedings MEMS 98 IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines & Systems (Cat No98CH36176; 1998, p425-428, 4p
Databáze: Complementary Index