Deep micromachining of insulating materials by etching of laterally constrained distributions of ion tracks.
| Autor: | Thornell, G., Bengtsson, H., Spohr, R., Van Veldhuizen, E.J., Westerberg, L., Schweitz, J.-A., Studer, B., Hjort, K. |
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| Zdroj: | Proceedings MEMS 98 IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines & Systems (Cat No98CH36176; 1998, p211-217, 7p |
| Databáze: | Complementary Index |
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