A new basic technology for magnetic micro-actuators.
| Autor: | Fullin, E., Gobet, J., Tilmans, H.A.C., Bergqvist, J. |
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| Zdroj: | Proceedings MEMS 98 IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines & Systems (Cat No98CH36176; 1998, p143-147, 5p |
| Databáze: | Complementary Index |
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