Test structures for the evaluation of Si substrates.
| Autor: | Kokawa, Y., Kimura, M., Kume, M., Yamamoto, H., Koyama, A. |
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| Zdroj: | Proceedings International Conference on Microelectronic Test Structures; 1995, p81-85, 5p |
| Databáze: | Complementary Index |
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