A packaged silicon MEMS vibratory gyroscope for microspacecraft.
| Autor: | Tang, T.K., Gutierrez, R.C., Stell, C.B., Vorperian, V., Arakaki, G.A., Rice, J.T., Li, W.J., Chakraborty, I., Shcheglov, K., Wilcox, J.Z., Kaiser, W.J. |
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| Zdroj: | Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines & Robots; 1997, p500-505, 6p |
| Databáze: | Complementary Index |
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