Flexural-plate-wave actuators based on PZT thin film.
| Autor: | Luginbuhl, Ph., Collins, S.D., Racine, G.-A., Gretillat, M.-A., de Rooij, N.F., Brooks, K.G., Setter, N. |
|---|---|
| Zdroj: | Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines & Robots; 1997, p327-332, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|