Fine frequency tuning in resonant sensors.
| Autor: | Cabuz, C., Fukatsu, K., Hashimoto, H., Shoji, S., Kurabayashi, T., Minami, K., Esashi, M. |
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| Zdroj: | Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines & Robotic Systems; 1994, p245-250, 6p |
| Databáze: | Complementary Index |
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