Buckled membranes for microstructures.
| Autor: | Popescu, D.S., Lammerink, T.S.J., Elwenspoek, M. |
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| Zdroj: | Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines & Robotic Systems; 1994, p188-192, 5p |
| Databáze: | Complementary Index |
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