High resolution definition of buried In/sub 0.53/Ga/sub 0.47/As/InP wires by implantation induced intermixing.
| Autor: | Oshinowo, J., Dreybrodt, J., Forchel, A., Emmerling, M., Gyuro, I., Speier, P., Zielinski, E. |
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| Zdroj: | LEOS 1992 Summer Topical Meeting Digest on Broadband Analog & Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics & Smart Pixels; 1992, p63-66, 4p |
| Databáze: | Complementary Index |
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