Investigation on the flow properties of BPSG films.
| Autor: | Tsai, Y.H., Hsu, S.L., Tseng, F.C., Yoo, C.S. |
|---|---|
| Zdroj: | International Symposium on VLSI Technology, Systems & Applications; 1989, p83-88, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Tsai, Y.H., Hsu, S.L., Tseng, F.C., Yoo, C.S. |
|---|---|
| Zdroj: | International Symposium on VLSI Technology, Systems & Applications; 1989, p83-88, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|