A highly manufacturable corner rounding solution for 0.18 /spl mu/m shallow trench isolation.
| Autor: | Chang, C.P., Pai, C.S., Baumann, F.H., Liu, C.T., Rafferty, C.S., Pinto, M.R., Lloyd, E.J., Bude, M., Klemens, F.P., Miner, J.F., Cheung, K.P., Colonell, J.I., Lai, W.Y.C., Vaidya, H., Hillenius, S.J., Liu, R.C., Clemens, J.T. |
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| Zdroj: | International Electron Devices Meeting IEDM Technical Digest; 1997, p661-664, 4p |
| Databáze: | Complementary Index |
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