A novel BST storage capacitor node technology using platinum electrodes for Gbit DRAMs.
| Autor: | Khamankar, R.B., Kressley, M.A., Visokay, M.R., Moise, T., Xing, G., Nemoto, S., Okumo, Y., Fang, S.J., Wilson, A.M., Gaynor, J.F., Hurd, T.Q., Crenshaw, D.L., Summerfelt, S., Colombo, L. |
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| Zdroj: | International Electron Devices Meeting IEDM Technical Digest; 1997, p245-248, 4p |
| Databáze: | Complementary Index |
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