Novel thermal microactuator based on CVD-diamond films.
| Autor: | Gluche, P., Leuner, R., Kohn, E., Rembe, C., Aus der Wiesche, S., Hofer, E.P. |
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| Zdroj: | International Electron Devices Meeting 1998 Technical Digest (Cat No98CH36217); 1998, p483-486, 4p |
| Databáze: | Complementary Index |
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