The Vapor Phase Deposition Of Fluorocarbon Films For The Prevention Of In-Use Stiction In Micromirrors.
| Autor: | Sang-Ho Lee, Myong-Jong Kwon, Jin-Goo Park, Yong-Kweon Kim, Hyung-Jae Shin |
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| Zdroj: | Digest of Papers Microprocesses & Nanotechnology'98 198 International Microprocesses & Nanotechnology Conference (Cat No98EX135); 1998, p172-173, 2p |
| Databáze: | Complementary Index |
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