Application of large scale binary optical elements to high resolution projection optics used for microlithography.
| Autor: | Unno, Y., Sekine, Y., Murakami, E., Ohta, M., Hirose, R. |
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| Zdroj: | Digest of Papers Microprocesses & Nanotechnology '99 1999 International Microprocesses & Nanotechnology Conference; 1999, p200-201, 2p |
| Databáze: | Complementary Index |
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