Preparation of high-quality /spl mu/c-Si:H films by a hydrogen-radical CVD method [solar cells].

Autor: Lo, L.-F., Hatta, M., Andoh, N., Nagayoshi, H., Kamisako, K.
Zdroj: Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference - 1997; 1997, p651-654, 4p
Databáze: Complementary Index