Whole wafer characterization of large size GaAs-AlGaAs semiconductor materials prepared by MOCVD TurboDisc/sup TM/ technology.
| Autor: | Feng, Z.C., Armour, E., Thompson, A.G., Stall, R.A. |
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| Zdroj: | Compound Semiconductors 1997 Proceedings of the IEEE Twenty-Fourth International Symposium on Compound Semiconductors; 1998, p287-290, 4p |
| Databáze: | Complementary Index |
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