Using scanned electron beams for testing microstructure isolation and continuity.
| Autor: | Aton, T.J., Joyner, K.A., Blanton, C.H., Appel, A.T., Harward, M.G., Bennett-Lilley, M.H., Mahant-Shetti, S.S. |
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| Zdroj: | 29th Annual Proceedings Reliability Physics 1991; 1991, p239-244, 6p |
| Databáze: | Complementary Index |
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