Reliability study of thin inter-poly dielectrics for non-volatile memory application.

Autor: Mori, S., Kaneko, Y., Arai, N., Ohshima, Y., Araki, H., Narita, K., Sakagami, E., Yoshikawa, K.
Zdroj: 28th Annual Proceedings on Reliability Physics Symposium; 1990, p132-144, 13p
Databáze: Complementary Index