Reliability study of thin inter-poly dielectrics for non-volatile memory application.
Autor: | Mori, S., Kaneko, Y., Arai, N., Ohshima, Y., Araki, H., Narita, K., Sakagami, E., Yoshikawa, K. |
---|---|
Zdroj: | 28th Annual Proceedings on Reliability Physics Symposium; 1990, p132-144, 13p |
Databáze: | Complementary Index |
Externí odkaz: |