Plasma diagnostics on RF inductively coupled ion source.
| Autor: | Wei Guo, Lanter, W., Wu, R.L.C., DeJoseph, C.A. |
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| Zdroj: | 25th Anniversary, IEEE Conference Record - Abstracts 1998 IEEE International Conference on Plasma Science (Cat No98CH36221); 1998, p120-121, 2p |
| Databáze: | Complementary Index |
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