Inner cylinder Ta/sub 2/O/sub 5/ capacitor process for 1 Gb DRAM and beyond.
| Autor: | Seok Jun Won, Yong Woo Hyung, Kab Jin Nam, Young Dae Kim, Ki Yeon Park, Young Wook Park, Sang In Lee, Moon Young Lee |
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| Zdroj: | 1999 Symposium on VLSI Technology Digest of Technical Papers (IEEE Cat No99CH36325); 1999, p97-98, 2p |
| Databáze: | Complementary Index |
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