Implementation of the IMEC-Clean in advanced CMOS manufacturing.
| Autor: | Meuris, M., Arnauts, S., Cornelissen, I., Kenis, K., Lux, M., Degendt, S., Mertens, P., Teerlinck, I., Vos, R., Loewenstein, L., Heyns, M.M., Wolke, K. |
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| Zdroj: | 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No99CH36314); 1999, p157-160, 4p |
| Databáze: | Complementary Index |
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