The development of a beam line using an RFQ and 3-Gap RF accelerators for high energy ion implanter.
| Autor: | Fujisawa, H., Hamamoto, N., Nishigami, Y., Miyabayashi, K., Haseme, T., Inouchi, Y., Okuda, S., Fujita, H., Yamahara, N., Naito, M. |
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| Zdroj: | 1998 International Conference on Ion Implantation Technology Proceedings (Cat No98EX144); 1999, Issue 1, p203-203, 1p |
| Databáze: | Complementary Index |
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