Is surface potential measurement (SPM) a useful charging damage measurement method?
| Autor: | Cheung, K.P., Colonell, J.I., Steiner, K.G., Shive, S., Kook, T., Chang, C.-P., Lai, W.-Y.-C., Liu, C.-T., Liu, R., Pai, C.-S., Vaidya, H., Clemens, J.T. |
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| Zdroj: | 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat No98EX100); 1998, p18-21, 4p |
| Databáze: | Complementary Index |
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