Photosensitive benzocyclobutene for stress-buffer and passivation applications (one mask manufacturing process).

Autor: Strandjord, A.J.G., Rogers, W.B., Ida, Y., DeVeillis, R.R., Shiau, S., Moyer, E.S., Scheck, D.M., Garron, P.E.
Zdroj: 1997 Proceedings 47th Electronic Components & Technology Conference; 1997, p1260-1268, 9p
Databáze: Complementary Index