Lateral power MOSFET low-doped drain (LDD) misalignment test structure.
| Autor: | Vitomirov, I.M., Seabridge, S.N., Raisanen, A.D., Tellier, T. |
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| Zdroj: | 1997 IEEE International Conference on Microelectronic Test Structures Proceedings; 1997, p31-34, 4p |
| Databáze: | Complementary Index |
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