Cleaning and polishing as key steps for Smart-cut(R) SOI process.
| Autor: | Moriceau, H., Maleville, C., Cartier, A.M., Aspar, B., Soubie, A., Bruel, M., Poumeyrol, T., Metral, F., Auberton-Herve, A.J. |
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| Zdroj: | 1996 IEEE International SOI Conference Proceedings; 1996, p152-153, 2p |
| Databáze: | Complementary Index |
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