A novel pattern transfer process for bonded SOI giga-bit DRAMs.
| Autor: | Lee, B.H., Bae, G.J., Lee, K.W., Cha, G., Kim, W.D., Lee, S.I., Barge, T., Auberton-Herve, A.J., Lamure, J.M. |
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| Zdroj: | 1996 IEEE International SOI Conference Proceedings; 1996, p114-115, 2p |
| Databáze: | Complementary Index |
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