Application of force fill Al-plug technology to 64 Mb DRAM and 0.35 /spl mu/m logic.
| Autor: | Mizobuchi, K., Hamamoto, K., Utsugi, M., Dixit, G.A., Poarch, S., Havemann, R.H., Dobson, C.D., Jeffryes, A.I., Holverson, P.J., Rich, P., Butler, D.C., Rimmer, N., McGeown, A. |
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| Zdroj: | 1995 Symposium on VLSI Technology Digest of Technical Papers; 1995, p45-46, 2p |
| Databáze: | Complementary Index |
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