"Smart cut": a promising new SOI material technology.
Autor: | Bruel, M., Aspar, B., Charlet, B., Maleville, C., Poumeyrol, T., Soubie, A., Auberton-Herve, A.J., Lamure, J.M., Barge, T., Metral, F., Trucchi, S. |
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Zdroj: | 1995 IEEE International SOI Conference Proceedings; 1995, p178-179, 2p |
Databáze: | Complementary Index |
Externí odkaz: |