"Smart cut": a promising new SOI material technology.

Autor: Bruel, M., Aspar, B., Charlet, B., Maleville, C., Poumeyrol, T., Soubie, A., Auberton-Herve, A.J., Lamure, J.M., Barge, T., Metral, F., Trucchi, S.
Zdroj: 1995 IEEE International SOI Conference Proceedings; 1995, p178-179, 2p
Databáze: Complementary Index