Implementation of MEMCAD system for electrostatic and mechanical analysis of complex structures from mask descriptions.
| Autor: | Gilbert, J.R., Osterberg, P.M., Harris, R.M., Ouma, D.O., Cai, X., Pfajfer, A., White, J., Senturia, S.D. |
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| Zdroj: | 1993 Proceedings IEEE Micro Electro Mechanical Systems; 1993, p207-212, 6p |
| Databáze: | Complementary Index |
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