Process and design considerations for surface micromachined beams for a tuneable interferometer array in silicon.
| Autor: | Aratani, K., French, P.J., Sarro, P.M., Wolffenbuttel, R.F., Middelhoek, S. |
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| Zdroj: | 1993 Proceedings IEEE Micro Electro Mechanical Systems; 1993, p230-235, 6p |
| Databáze: | Complementary Index |
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