A twin-tub CMOS using self-aligned channel-stop in conjunction with poly-buffer LOCOS for 1M/4M SRAM application.

Autor: Chen, M.-L., Juengling, W., Hillenius, S.J., Yang, T.S., Fu, C.C., Favreau, D.P., Powell, R.
Zdroj: 1991 International Symposium on VLSI Technology, Systems & Applications - Proceedings of Technical Papers; 1991, p358-361, 4p
Databáze: Complementary Index