Development of an Improved Fundamental Model for the Multiwafer LPCVD Reactor.
| Autor: | Badgwell, Thomas A., Edgar, Thomas F., Trachtenberg, Isaac, Elliott, J. Kiefer |
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| Zdroj: | 1991 American Control Conference; 1991, p2858-2865, 8p |
| Databáze: | Complementary Index |
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