Selective tungsten on aluminum for improved VLSI interconnects.
| Autor: | Hey, H.P.W., Sinha, A.K., Steenwyk, S.D., Rana, V.V.S., Yeh, J.L. |
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| Zdroj: | 1986 International Electron Devices Meeting; 1986, p50-53, 4p |
| Databáze: | Complementary Index |
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