Failure analysis on non-visible front-end defects in deep NWELL implantation related process.
| Autor: | Ang, Ghim Boon, Chen Changqing, Zhao Si Ping, Neo Soh Ping, Yip Kim Hong, Loh Sock Khim, Ng Hui Peng, Teo, Angela, Ng Peng Tiong |
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| Zdroj: | Proceedings of the 20th IEEE International Symposium on the Physical & Failure Analysis of Integrated Circuits (IPFA); 2013, p177-181, 5p |
| Databáze: | Complementary Index |
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