A new method for eliminating cross axis sensitivity in two axis capacitive micromachined accelerometers.
| Autor: | Tavakoli, Hadi, Sani, Ebrahim Abbaspour |
|---|---|
| Zdroj: | 2013 21st Iranian Conference on Electrical Engineering (ICEE); 2013, p1-5, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|