Liquid-delivery MOCVD: chemical and process perspectives on ferro-electric thin film growth.
Autor: | Roeder, J. F, Baum, T. H, Bilodeau, S. M, Stauf, G. T, Ragaglia, C., Russell, M. W, Van Buskirk, P. C |
---|---|
Zdroj: | Advanced Materials for Optics & Electronics; 2000, Vol. 10 Issue 3-5, p145-154, 10p |
Databáze: | Complementary Index |
Externí odkaz: |