Optical and morphological properties of SiN x/Si amorphous multilayer structures grown by Plasma Enhanced Chemical Vapor Deposition.
| Autor: | Santana, G., de Melo, O., Aguilar-Hernández, J., Monroy, B. M., Fandiño, J., Cruz, F., Ortiz, A., Contreras-Puentes, G., Alonso, J. C. |
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| Zdroj: | Physica Status Solidi (C); 2005, Vol. 2 Issue 10, p3698-3701, 4p |
| Databáze: | Complementary Index |
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