Comparison of the Pyrolysis Products of Dichlorodimethylsilane in the Chemical Vapor Deposition of Silicon Carbide on Silica in Hydrogen or Argon.

Autor: Cagliostro, Domenick E., Riccitiello, Salvatore R, Ren, Jian, Zaghi, Farshad
Zdroj: Journal of the American Ceramic Society; 1994, Vol. 77 Issue 10, p2721-2726, 6p
Databáze: Complementary Index
Externí odkaz: