Micromachined SPM probes with sub-100 nm features at tip apex.

Autor: Schürmann, G., Indermühle, P. F., Staufer, U., de Rooij, N. F.
Zdroj: Surface & Interface Analysis: SIA; 1999, Vol. 27 Issue 5/6, p299-301, 3p
Databáze: Complementary Index
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