Comparative film thickness determination by atomic force microscopy and ellipsometry for ultrathin polymer films.

Autor: Gesang, T., Fanter, D., Höper, R., Possart, W., Hennemann, O.-D.
Zdroj: Surface & Interface Analysis: SIA; 1995, Vol. 23 Issue 12, p797-808, 12p
Databáze: Complementary Index
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