Interface analysis in polysilicon thin films and poly-Si/SiO2 systems.
| Autor: | Nakhodkin, N. G., Rodionova, T. V. |
|---|---|
| Zdroj: | Surface & Interface Analysis: SIA; 1992, Vol. 18 Issue 10, p709-712, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Nakhodkin, N. G., Rodionova, T. V. |
|---|---|
| Zdroj: | Surface & Interface Analysis: SIA; 1992, Vol. 18 Issue 10, p709-712, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
Plný text