Interface analysis in polysilicon thin films and poly-Si/SiO2 systems.
Autor: | Nakhodkin, N. G., Rodionova, T. V. |
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Zdroj: | Surface & Interface Analysis: SIA; 1992, Vol. 18 Issue 10, p709-712, 4p |
Databáze: | Complementary Index |
Externí odkaz: |
Autor: | Nakhodkin, N. G., Rodionova, T. V. |
---|---|
Zdroj: | Surface & Interface Analysis: SIA; 1992, Vol. 18 Issue 10, p709-712, 4p |
Databáze: | Complementary Index |
Externí odkaz: |