Facts and artefacts in the characterization of Si/SiGe multiayers with SIMS.
| Autor: | Zalm, P. C., Vriezema, C. J., Gravesteijn, D. J., van de Walle, G. F. A., de Boer, W. B. |
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| Zdroj: | Surface & Interface Analysis: SIA; 1991, Vol. 17 Issue 8, p556-566, 11p |
| Databáze: | Complementary Index |
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