Post-implantation as an aid in scale calibration for SIMS depth profiling.

Autor: Zalm, P. C., Janssen, K. T. F., Fontijn, G. M., Vriezema, C. J.
Zdroj: Surface & Interface Analysis: SIA; 1989, Vol. 14 Issue 11, p781-786, 6p
Databáze: Complementary Index