| Autor: |
Liewald, Jan-Timo, Kuhlmann, Burkhard, Balslink, Thorsten, Trachtler, Martin, Dienger, Matthias, Manoli, Yiannos |
| Předmět: |
|
| Zdroj: |
Journal of Microelectromechanical Systems; Oct2013, Vol. 22 Issue 5, p1115-1125, 11p |
| Abstrakt: |
The behavior of MEMS rate gyroscopes depends on the sensor's resonance frequency f0. Key features like robustness against external vibrations and ease of integration can be optimized by increasing f0. We designed and fabricated a device with f0=100~kHz for experimental and theoretical investigation of MEMS vibratory gyroscopes with increased f0. The frequency of 100 kHz is significantly above the typical f0 of current gyroscopes which is in the range of 10 kHz to 30 kHz. Measurements prove that key parameters that are theoretically derived from a 15 kHz reference model can be scaled to 100 kHz with good accuracy. It is shown that the increase of f0 to 100 kHz has—on the one hand—design trade offs like a much lower sensitivity and higher quadrature and—on the other hand—major advantages like the significantly improved vibration robustness. \hfill[2012\-0317] [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
|
