Very low gas flow measurements for UHV/XHV and leak calibration.
Autor: | Li Detian, Cheng Yongjun, Feng Yan, Xi Zhenhua, Zhao Lan |
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Zdroj: | Metrologia; Feb2013, Vol. 50 Issue 1, p15-19, 5p |
Databáze: | Complementary Index |
Externí odkaz: |
Autor: | Li Detian, Cheng Yongjun, Feng Yan, Xi Zhenhua, Zhao Lan |
---|---|
Zdroj: | Metrologia; Feb2013, Vol. 50 Issue 1, p15-19, 5p |
Databáze: | Complementary Index |
Externí odkaz: |