Small diameter via filling electrodeposition by periodical reverse current.
| Autor: | Hayashi, Taro, Kondo, Kazuo, Saito, Takeyasu, Okamoto, Naoki, Yokoi, Masayuki, Takeuchi, Minoru, Bunya, Masaru, Marunaka, Masao, Tsuchiya, Takayuki |
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| Zdroj: | 2013 IEEE 63rd Electronic Components & Technology Conference; 2013, p1697-1702, 6p |
| Databáze: | Complementary Index |
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