Outgassing characterization of MEMS thin film packaging materials.
| Autor: | Savornin, B., Baillin, X., Blanquet, E., Nuta, I., Patrice, D. Saint, Nicolas, P., Charvet, P. L., Pornin, J. L |
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| Zdroj: | 2013 IEEE 63rd Electronic Components & Technology Conference; 2013, p1514-1518, 5p |
| Databáze: | Complementary Index |
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